On the Electromechanical Behaviour of Thin Perforated Backplates in Silicon Condenser Microphones
نویسندگان
چکیده
In this work an alternative approach to the modelling of plates with a large number of holes, is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalising the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electromechanical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algoritbm based on finite differences.
منابع مشابه
On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones
In this paper an alternaUve approach to the modelling of plates with a large number of holes is pres;nted. By means of plate theoPy, it is shown that perforated plates can be modelled by conventional orthouopic plates with modified elastic preponies. The modification of the elastic constants is derived by equalizing the strain-energy oftbe perforated and the ortholropic plate. The model oblaine...
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